There are 2 Type of
VMB
:
Normal VMB (Without Touch Panel)
Touch Screen Controlled VMB
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Specifications:
-
PLC Controller
-
Touch Screen
(Optional)
-
AC 110V/220V
60Hz
-
Analog
resolution : 16 bit, 4 channel
-
Pressure
Transducer : 4-20 mA, 2 wire input
-
Networking :
RS232 or RS485
-
Type : 1
supply in 3, 4, 6 supply out
-
Purge & Vacuum
: Nitrogen, Vent Type
Functions available for the Normal VMB:
Emergency Shutdown is provided to ensure safe handling of the hazardous
gases which are often used in the semiconductor industry.
5 Different kinds of Shutdown Cabilities:
Local, Remote, User, Excess Flow Switch
Life Safety Alarm Reporting to alert User of any Fault at the System
2 Kinds of Alarm Reporting:
Critical - Local, Remote, User, Excess Flow Switch and Life Safety
Warning - High and Low Pressure Alert
2 Types of Alarm Devices used on the Panel to indicate the status
of the VMB:
Buzzer and LED Lamps
Functions available for the VMB with Touch Panel:
Besides having all the function of a Normal VMB, this VMB has Password
and Security Protection to prevent non-authorized personnel to access
the System.
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